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Daniel Joseph Christian Herr, Ph.D.

Professor & Nanoscience Department Chair

Phone: 336-285-2862

Fax: 336-500-0115

Email: djherr@uncg.edu


Dr. Herr is a pioneer in collaborative nanotechnology research, development, manufacturing and innovative supply chain management, as well as catalyzing interest in STEM related education and communicating science to the community. He serves as UNC-Greensboro’s professor and Nanoscience Department Chair at the Joint School of Nanoscience and Nanoengineering (JSNN) in Greensboro, North Carolina. He also directs North Carolina’s Nanomanufacturing Innovation Consortium (NIC), which facilitates industrial-academic networking and nurtures access to and value extraction from the JSNN’s facilities and faculty to catalyze economic development. The NIC offers nanomaterials, nanofabrication tools, processes, characterization and expertise that address member needs. This work enables emerging and potentially disruptive More-than-Moore (M-t-M) technologies and market opportunities, e.g. non-scaled complex functional nanosystems, such as healthcare and medical diagnostics and theranostics; green materials and sustainable processes; energy scavenging and storage devices; flexible nanoelectronics; and smart textile, aerospace, transportation, construction, and agriculture technologies, etc., which drive the realization of the Internet of Things.

Prior to joining the JSNN, he served as the Director of Semiconductor Research Corporation’s [SRC’s] Nanomanufacturing Sciences area, leading an international team that provides vision, guidance, and leveraged support for a number of the top interdisciplinary, nanoelectronics related, university research programs. In this role, he composed and guided SRC’s strategic graduate research programs in advanced patterning and directed self-assembly, functional nanoengineered materials, high performance – environmentally sustainable nanofabrication, and advanced nanometrology. He was a contributing member of the SRC team that was awarded the 2005 National Medal of Technology. Dr. Herr began his career as a mechanistic photochemist and synthetic electrochemist. His twenty-seven years of experience in the semiconductor industry includes the design of high performance nano-engineered materials and unit process integration with Honeywell; efficient and robust product design and optimization, with his start-up AR&D; and co-design and development of the first commercially available family of chemically amplified photoresists, with Shipley Far East, Ltd. His quality engineering start-up offered a suite of applied optimization tools, which is significantly more robust than Taguchi’s methodology and enabled rapid and robust, custom product, material, and process design for U.S. and Far East customers.

As founding co-chair of the International Technology Roadmap for Semiconductors’ (ITRS) Emerging Research Materials Working Group, Dr. Herr provides ongoing technical leadership on emerging strategic materials and processes for the international nanoelectronics community. It also anticipates and monitors potentially disruptive materials and process opportunities, e.g. Quantum materials systems; flexible electronics; deterministic, multi-functional, and biomimetic materials and processes; as well as other high impact application opportunities, e.g. Communication, smart transportation, big data, green/energy, medical/health, and smart agriculture technologies, etc., which will drive the data input, access, and processing environment for the Internet of Things.

Dr. Herr serves as Adjunct Associate Professor in Materials Science and Engineering at North Carolina State University, where he co-teaches a graduate level course on The Materials Science of Nanoelectronics. He recently was promoted to serve as Regional Editor for the Journal of Nanoparticle Research, Senior Editor for IEEE Transactions in Nanotechnology, and Reviewer for the Journal of Vacuum Science and Technology. He also was elected to serve as the AAAS Industrial Science and Technology section’s Member-at-Large, Fellow of the International Society for Optical Engineering for the design, development, and commercialization of two early families of chemically amplified resists, and chaired or co-chair of several international technical conferences. He is the inventor of several foundational patents and disclosures on defect tolerant patterning, controlled nanotube synthesis and placement, deterministic semiconductor doping, ultimate CMOS devices, and hydroponically grown smart textiles.

Research Interests

His current research interests include useful functional self-assembly and biomimetic systems, flexible nanoelectronics and functional textiles, nanobioelectronics and nanoenergy, as well as smart and sustainable nanoagriculture and advanced hydroponic systems.

Selected Publications

Selected Publications and Invited On-Line Presentations Dr. Herr has developed materials for 9 undergraduate and graduate technical and science courses, has authored or co-authored more than five books and proceedings and more than 50 chemistry and semiconductor technology related journal publications, with papers in: The Journal of the Materials Research Society, IEEE Transactions on Nanotechnology, IEEE Transactions on Semiconductor Manufacturing, IEEE Computer, Journal of Nanoparticle Research, Proceedings of the International Society for Optical Engineering, American Chemical Society, and Tetrahedron Letters. The following selection of publications reflects the scope of his interests.
  1.  Ryan, J.G, Herr, D.J.C, Kelkar A. (2014). Nanoscience and Nanoengineering: Advances and Applications, Boca Raton, FL: CRC Press/Taylor Francis Group. [Technical]
  2. Herr, D.J.C., and Garner, C.M., (Editors) (2007-2014 Editions). Emerging Research Materials Chapter, The International Technology Roadmap for Semiconductors, International Technology Roadmap for Semiconductors. [Strategic Industrial]
  3. 3.      Herr, D.J.C., (November 1, 2013). Nanotechnology: Needs, Risks, and Opportunities, NACK Network Webinars, URL: http://nano4me.org/webinars.php?offset=-4#showW14 . [Educational]
  4. 4.      Herr, D.J.C. (May 2013). Nanoinspired by Nature, TEDxGreensboro, URL: https://www.youtube.com/watch?v=SQfvJhSwHHw [Educational]
  5. Herr, D.J.C. (2011). Directed block copolymer self-assembly for nanoelectronics fabrication”, Journal of the Materials Research, 26(2), pp. 122-139. [Technical]
  6. Burke, P., Du, C., Herr, D.J.C., Jensen, J.O., Lugli, P., Radack, D.J., Stroscio, M., Swaminathan, V., Towe, E., and Woolard, D.L., (Editors). (2011). Special Issue on Device Concepts, Architectural Strategies and interfacing Methodologies for Nanoscale Sensor Systems, IEEE Transactions on Nanotechnology, 10 (1). [Technical]
  7. Burke, P., Du, C., Herr, D.J.C., Jensen, J.O., Lugli, P., Radack, D.L., Stroscio, Swaminathan, M.V., Towe, E., and Woolard, D.L., (September 2010), Device Concepts, Architectural Strategies, and Interfacing Methodologies for Nanoscale Sensor Systems, IEEE Transactions on Nanotechnology, 9(5), pp. 523-526 Special Issue.
  8. Seiler, D.G., Diebold, A.C., McDonald, R., Garner, C.M., Herr, D.J.C., Khosla, P.P., Secula, E.M. (Editors). (2007) Frontiers of Characterization and Metrology for Nanoelectronics: 2007, American Institute of Physics Conference Proceedings, 931, Melville, NY: American Institute of Physics. [Technical]
  9. Herr, D.J.C., (January 9, 2007), Challenges in Directed Self-Assembly [1], Future Fab International, 22, on-line.
  10. Cavin, R.K., Zhirnov, V., Herr, D.J.C. (2006). “Research Directions and Challenges in Nanoelectronics” (Invited Paper), Journal of Nanoparticle Research, 8 (6), pp 841-858 [Technical]
  11. Herr, D.J.C. (2005). The Interdependence of Intrinsic Dopant Wavefront Roughness and the Limits of High Frequency Line Edge Roughness”, International Technology Roadmap for Semiconductors, Appendix 2005 Edition. [Technical/Industrial]
  12. Angelopoulos, M., Dobisz, E.A., Gonsalves, K. E., Herr, D. J. C., Merhari, L., (Editors), (2002), Nanopatterning – From Ultralarge-Scale Integration to Biotechnology, Material Research Society Symposium Proceedings, 705, Materials Research Society: Warrendale, PA.
  13. Cavin, R.K., Herr, D.J.C., Zhirnov, V.V., et.al., (December 2005), “A long-term View of Research Targets in Nanoelectronics” (Invited Paper), Journal of Nanoparticle Research, 7(6), pp. 573-58.
  14. Daniel J. Herr, D.J.C., (Chair/ed.), (2003), Metrology, Inspection, and Process Control for Microlithography XVII, Parts I and II, Proceedings of the International Society for Optical Engineering, 5038, Bellingham, WA: International Society for Optical Engineering
  15. Herr, D.J.C., Zhirnov, V.V., (2001), “New Frontiers: Self-Assembly and Nanoelectronics”, Victor V. Zhirnov and Daniel J. C. Herr, IEEE Computer, 34(1), pp. 34-43.
  16. Herr, D. J.C. (1990). Optimization Strategies for Microelectronic Devices and Processes, Bellingham, WA: The Society of Photo-optical Instrumentation Engineers. [Technical/Industrial]

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Patents

Selected Intellectual Property: Selected Patents Issued:
  1. Patterning Methods and Systems Using Reflected Interference Patterns; SRC Patent ID: P0267; TAIWAN, R.O.C. Patent No.: NI-1545 ; Inventors: Herr, SRC; Joy, UT/Knoxville; File Date: 21-Feb-2001; Issue Date: 1-May-2002
  2. Solventless, Resistless, Direct Dielectric Patterning; SRC Patent ID: P0087; USA Patent No.: 6509138; Inventors: Gleason, MIT; Herr, SRC; Ober, Cornell; File Date: 12-Jan-2000; Issue Date: 21-Jan-2003
  3. Solventless, Resistless, Direct Dielectric Patterning; SRC Patent ID: P0207; TAIWAN, R.O.C. Patent No.: 171285 ; Inventors: Gleason, MIT; Herr, SRC; Ober, Cornell; File Date: 9-Jan-2001; Issue Date: 2-Jun-2003
  4. Supermolecular Structures and Devices Made from Same; SRC Patent ID: P0165; USA Patent No.: 6664559; Inventors: Herr, SRC; Zhirnov, SRC; File Date: 23-Feb-2000; Issue Date: 16-Dec-2003
Patents Pending [15]
  1. Hydroponic Compositions and Applications Thereof, PCT/US14/32810, Inventor: Herr, Daniel J.C./UNCG, File Date: April 3, 2014.
  2. Supermolecular Structures and Devices Made From Same; SRC Patent ID: P0425; Inventors: Herr, SRC; Zhirnov, SRC; File Date: 14-Oct-2003
  3. Nanostructures Including Controllably positioned and Aligned Synthetic Nanotubes, and related methods; SRC Patent ID: P0416; Inventor: Herr, SRC; File Date: 1-Oct-2003
  4. Deterministically Doped Field Effect Devices and Methods of Making Same; SRC Patent ID: P0417; Inventors: Herr, SRC; Zhirnov, NC State; File Date: 14-Aug-2003
  5. Deterministically Doped Field Effect Devices and Methods of Making Same; SRC Patent ID: P0418; Inventors: Herr, SRC; Zhirnov, NC State; File Date: 25-Aug-2003
  6. Nanostructures Including Controllably positioned and Aligned Synthetic Nanotubes, and related methods; SRC Patent ID: P0273; Inventors: Frechet, UC/Berkeley; Herr, SRC; File Date: 15-Oct-2002
  7. Patterning Methods and Systems Using Reflected Interference Patterns; SRC Patent ID: P0195; Inventors: Herr, SRC; Joy, UT/Knoxville; File Date: 28-Feb-2000
  8. Patterning Methods and Systems Using Reflected Interference Patterns; SRC Patent ID: P0262; Inventors: Herr, SRC; Joy, UT/Knoxville; File Date: 22-Feb-2001
  9. Patterning Methods and Systems Using Reflected Interference Patterns; SRC Patent ID: P0329; Inventors: Herr, SRC; Joy, UT/Knoxville; File Date: 22-Feb-2001
  10. Solventless, Resistless, Direct Dielectric Patterning; SRC Patent ID: P0217; Inventors: Gleason, MIT; Herr, SRC; Ober, Cornell; File Date: 11-Jan-2001
  11. Solventless, Resistless, Direct Dielectric Patterning; SRC Patent ID: P0308; Inventors: Gleason, MIT; Herr, SRC; Ober, Cornell; File Date: 11-Jan-2001
  12. Supercritical Fluid case; SRC Patent ID: P0327; Inventors: Gleason, MIT; Herr, SRC; Ober, Cornell; File Date: 23-Oct-2002; Research 426
  13. Supermolecular Structures and Devices Made from Same; SRC Patent ID: P0229; Inventors: Herr, SRC; Zhirnov, SRC; File Date: 23-Feb-2001
  14. Supermolecular Structures and Devices Made from Same; SRC Patent ID: P0230; Inventors: Herr, SRC; Zhirnov, SRC; File Date: 22-Feb-2001
  15. Supermolecular Structures and Devices Made from Same; SRC Patent ID: P0317; Inventors: Herr, SRC; Zhirnov, SRC; File Date: 22-Feb-2001
Proprietary Software (1) Concurrent Multi-response Optimization Toolset: Version 1.0; Avatar R & D IP ID: S87001; Inventor: Herr, Software Code Completed: 1984. Trade Secrets (2)
  1. A Remover for Acid Hardened Resists; Shipley Company Trade Secret; Inventors: Daniel J.C. Herr, Gary Calabrese, James W. Thackeray, and Theodore H. Fedynyshyn, Disclosure submitted to Shipley Company: 1991
  2. A Developer for Submicron Lithography; Honeywell Corporation Trade Secret; Inventor: Daniel J.C. Herr, Disclosure submitted to Honeywell Corporation: 1988
Office Hours

By Appointment

Education

1984 Doctor of Philosophy University of California at Santa Cruz, CA

1976 BA (Honors) Chemistry Wesleyan University, CT

Authored Papers

Dr. Herr has developed materials for 7 undergraduate and graduate technical and science courses and co-authored or co-edited more than 4 books and proceedings, including: D.G. Seiler, A.C. Diebold, R. McDonald, C. M. Garner, D. Herr, PP. Khosla, E. M. Secula (Editors), Frontiers of Characterization and Metrology for Nanoelectronics: 2007, American Institute of Physics Conference Proceedings, 931, Melville, NY: American Institute of Physics (2007); Daniel J. Herr (Chair/ed.), Metrology, Inspection, and Process Control for Microlithography XVII, Parts I and II, Proceedings of the International Society for Optical Engineering, 5038, Bellingham, WA: International Society for Optical Engineering (2003); Lhadi Merhari, Kenneth E. Gonsalves, Elizabeth A Dobisz, Marie Angelopoulos, and Daniel Herr (ed.), (2002). Nanopatterning – From Ultralarge-Scale Integration to Biotechnology, Material Research Society Symposium Proceedings, 705, Materials Research Society:  Warrendale, PA (2002); Daniel J. Herr (Chair/ed.), Metrology, Inspection, and Process Control for Microlithography XVI, Parts I and II, Proceedings of The International Society for Optical Engineering, 4689, Bellingham, WA: International Society for Optical Engineering.