JSIRT Core Facilities

JSIRT provides access to imaging and analytical instrumentation for nano and microscale lithography, nanomaterial fabrication, characterization, and computation, as well as hands-on training in a shared user environment. The fee-for-use based resources, tools, and labs are available to academic, industry, and government users through JSIRT. Labs and tools are divided below by core areas:  Advanced Microscopy, Analytical Chemistry, Materials Testing, Micro and Nanofabrication, and Other Resources.  In addition to the labs and tools, users have access world-class specialized training and highly skilled staff.  Remote service is available.  The service rate (staff labor) is $100 per hour for external for-profit organizations (industry) and $50 per hour for internal and external non-profit organizations (academic/government).  All charges for service and for instrumentation are rounded to the nearest quarter hour.

Advanced Microscopy

JSIRT offers access to a suite of advanced microscopy tools and resources, including equipment training, remote sample preparation and analysis, and new process and imaging consultations. In addition to a wide variety of visualization, characterization and fabrication tools with micro and nanometer scale controllability, JSIRT also provides expert-driven analysis through skilled research staff to address the needs of academic, industry and government users.

Analytical Chemistry

Whether you want to determine chemical structure or quantify trace elements, JSIRT offers access to a suite of analytical tools and resources including equipment training, remote material analysis and process consultations. JSIRT provides expert-driven analysis through skilled research staff to address the needs of academic, industry and government users.

Materials Testing

JSIRT provides material testing resources for aerospace, automotive, textile, chemical, analytical and physical testing applications. In addition to testing services, JSIRT provides research and consulting services. JSIRT specializes particularly in polymer matrix fiber reinforced composites and textiles.

Micro and Nanofabrication

JSIRT offers access to a suite of cleanroom micro/nanofabrication and material synthesis tools and resources, including equipment training, remote service, material analysis and consultations. JSNN provides expert-driven process development and analysis through skilled research staff to address the needs of academic, industry and government users.

Note:  Tools in the cleanroom will incur cleanroom use fees in addition to instrumentation rates, if applicable.

Other Resources

Beyond Advanced Microscopy, Analytical Chemistry, Materials Testing, and Micro and Nanofabrication, there are other resources available through JSIRT.

Full Instrumentation Listing

The full listing of JSIRT tools and labs is included below.  This listing is searchable and sortable.

Instrumentation

Description

Cost Per Hour (Industry)$

Cost Per Hour (Academic/Gov't) $

Advanced Microscopy

JEOL JEM-2100plus TEM

The JEOL JEM-2100 plus TEM is a multipurpose, 200 kV analytical electron microscope with ultrahigh TEM resolution as high as 0.19 nm (in UHR configuration) and with STEM and EDS options.

160

80

Zeiss Auriga FIB/FESEM with EDX

AURIGA CrossBeam consists of a field emission scanning electron microscope (FE-SEM) with GEMINI column accompanied by a Focused Gallium Ion Beam (FIB) column that offers Cross-sectioning, Nanotomography, Nanopatterning, 3D-Analytics, and TEM lamella preparation. Additionally, the system allows for elemental characterization through energy-dispersive X-ray spectroscopy (EDS/EDX).

80

40

JEOL JSM-IT800 Schottky FESEM

The JSM-IT800 incorporates an "In-lens Schottky Plus field emission electron gun" for high resolution imaging to fast elemental mapping, and an electron optical control system "Neo Engine", as well as a system of seamless GUI "SEM Center" for fast elemental mapping.

80

40

Leica EM CPD300 (Critical Point Dryer)

Biological specimens intended for investigation in a scanning electron microscope must be dried before being introduced into the microscope to allow the specimen to be imaged. If specimens with water content are dried, tangential forces, caused by surface tension of the water, destroys the structures of the specimen. Critical point drying with the EM CPD300 is the optimal method to prevent the damaging effects of the above-mentioned forces by bringing the liquid to the gas phase without boundary crossing. 

TBD

TBD

Leica UC7 Ultramicrotome

Leica EM UC7 Ultramicrotome provides easy preparation of semi- and ultrathin sections as well as perfect, smooth surfaces of biological and industrial samples for TEM, SEM, AFM and Light microscopy examination.

40

20

Leica Sputter Coater (AuPd/C)

Leica ACE200 is metal sputter and carbon deposition for SEM and TEM analysis.

20

10

Axio Imager Z2M upright Microscope

Axio Z2m is an upright materials microscope, utilizing multiple light sources and filters and allows for the collection of high resolution still images at 50-1,000x.

55

27.5

Cytoviva Darkfield and Hyperspectral Imaging 

This instrument is designed to support optical and hyperspectral imaging of nanoscale sample elements in both materials and biological based matrices.

61

30.5

Zeiss EVO LS SEM

Zeiss EVO LS10 is a variable pressure scanning electron microscope (VP-SEM), Capable of 6nm resolution in high vacuum mode. In extended pressure mode, imaging can be done at set pressures up to 3000 Pa. If used in conjunction with the Deben CoolStage II, biological and other wet samples may be imaged using the variable pressure secondary electron (VPSE) or backscatter detectors. Elemental analysis using the Oxford Inca EDX can be done in all modes.

80

40

Evident FV3000 Confocal Microscope with Abbelight SMLM

The Evident FV3000 has highly efficient and accurate TruSpectral detection on all channels. It is optimized for live cell imaging with high sensitivity and low phototoxicity.  Nanoscopy, also called Single Molecule Localization Microscopy (SMLM) circumvents the diffraction limit of fluorescence microscopy, providing nanometric spatial super-resolution. This revolutionary breakthrough in imaging relies on the ability of photoswitching fluorescent dyes. Because of its principle, SMLM stands out as the sole method capable of not only achieving such remarkable super-resolution but also quantifying and counting individual molecules within biological samples. -Abbelight

80

40

Buehler MetaServ 250 Grinder-Polisher

This instrument is used for metallographic specimen preparation.

20

10

Asylum MFP-3D Origin+ AFM

This instrument is capable of nanomechanical, nanoelectrical and electromechanical characterization.

73

36.5

Quorum GLOQUBE PLUS 

The GloQube® Plus is a compact and easy to use glow discharge system, designed to fulfil the needs of laboratories with TEM. The primary application of the GloQube® Plus is to modify the surface of TEM grids for successful imaging of a variety of macromolecules. Integrated into one system, the two chambers enable flexibility to choose which sample preparation technique they want to use: glow discharge in-air or in-chemical vapour. 

TBD

TBD

Thermo 325a Rotary Microtome

This instrument is capable of cutting high-quality paraffin sections for tissue processing.

30

15

Plasmaetch PE-25 400W Plasma Cleaner

PE-25 is a basic plasma cleaner, with oxygen and argon available, that excels at all types of cleaning and bonding.

TBD

TBD

Zeiss Elyra 7 with Lattice SIM² with SMLM

The super-resolution microscope Elyra 7 takes you beyond the diffraction limit of conventional microscopy: With Lattice SIM² you can now resolve the finest sub-organelle structures, even those no more than 60 nm apart. You don't need to sacrifice resolution when imaging at high-speed using only the minimal exposure needed for life observation. Elyra 7 enables you to combine super-resolution and rapid imaging without the need for special sample preparation or expert knowledge of complex microscopy techniques.

TBD

TBD

Analytical Chemistry Core

Agilent 1290 UPLC (HPLC)

This ultra HPLC system is designed to be both a HPLC and high-end UHPLC system in a single flow path.

60.00 (consumables not included)

30.00 (consumables not included)

Thermo Fisher Nicolet iS50 FTIR

This spectrometer features an all-in-one materials analysis station.  

60

30

Raptir Microscope for use with Thermo Fisher Nicolet iS50 FTIR

This microscope is used in conjunction with the Thermo Fisher Nicolet iS50 FTIR.

80

40

Micromeritics ASAP 2060 BET Analyzer

Details forthcoming

30

15

Sample Preparation for BET Analysis

Details forthcoming

1

0.5

Agilent 8890-5977B GC-MS

Delivers unparalleled analytical sensitivity with extreme operational efficiencies for ultra trace-level applications.

60.00 (consumables not included)

30 (consumables not included)

Agilent 7900 ICP-MS

The Agilent 7900 ICP-MS (Inductively Coupled Plasma - Mass Spectrometry) is a flexible single quadrupole ICP mass spectrometer that provides the industry’s best matrix tolerance, most effective helium collision mode, lowest detection limits, and widest dynamic range.

90

45

Rigaku Smartlab X-ray Diffr

Single crystal diffraction is a powerful X-ray technique for structural solution of crystals typically of 20 - 200 microns in diameter. It provides key information on the symmetry and atom positions in these crystals. Usage spans from routine structural work on organic and metal-organic small molecules to highly detailed investigations of heavy metal oxides that can include twins, modulated structures or diffuse scattering.

91

45.5

Agilent Cary Eclipse Fluorescence Spectrophotometer 

The Cary Eclipse fluorescence spectrophotometer was designed for Fluorescence, phosphorescence, chemi/bio-luminescence, and time resolved phosphorescence measurement.

55

27.5

Horiba XploRA Raman Confocal Microscope

The XploRA Raman microscope combines confocal microscopy with full spectral Raman analysis in one instrument, enabling simultaneous chemical identification and imaging. Common applications include quality control analysis, material validation, and pharmaceutical testing.

61

30.5

WiTec alpha300R Confocal Raman Microscope

The WiTec alpha300R Confocal Raman Microscope has hyperspectral image generation with the information of a complete Raman spectrum at every image pixel, excellent lateral resolution, and outstanding depth resolution ideally suited for 3D image generation and depth profiles. It features an ultra-fast Raman imaging option with under one millisecond integration time per spectrum. This is a non-destructive imaging technique: no staining of fixation of the sample required.

90

45

Malvern UltraRed Zetasizer 

The Zetasizer Nano ZS provides the ability to measure particle size, zeta potential and molecular weight of particles or molecules in a liquid medium over a wide range of concentrations.

61

30.5

Rame Hart Goniometer/Tensiometer

The Model 260 sports a wide range of methods based interfacial analysis tools for working with pendant, inverted pendant, sessile, and captive bubble drops. Additionally, contact angle, surface energy, surface tension, and calibration tools are included.

55

27.5

Sample Preparation Fume Hood

Used for sample preparation in the analytical chemistry core lab.

20

10

Agilent 400NMR

NMR spectrometers are used to test atomic and molecular properties of a sample (e.g. physical and chemical). The system is ideal for compound detection, quantitation and structural confirmation.

52

26

Agilent 700NMR

NMR spectrometers are used to test atomic and molecular properties of a sample (physical, chemical or biological). The system is ideal for compound detection, quantitation and structural confirmation.

90

45

Agilent Cary 7000 UV-Vis-NIR

The Agilent Cary 7000 universal measurement spectrophotometer (UMS) will satisfy all your solid sampling needs. Collect hundreds of UV-Vis-NIR spectra overnight, or characterize optical components or thin films in minutes to hours rather than hours to days. The Cary 7000 UMS is a turn-key solution for research, development, and QA/QC in optics, thin films/coatings, solar, and glass.

70

35

Agilent 670 FTIR Spectrometer w/ATR

The Varian 670 FT-IR is a research-grade spectrometer for application areas such as polymers/materials, pharmaceuticals, biotechnology and chemicals. The Varian 670-IR is also equipped with a diamond ATR crystal for IR sampling.

55

27.5

CEM Mars 6 Microwave Digester

This is a microwave synthesizer for performing a wide range of organic and inorganic synthetic chemistry.

55

27.5

Horiba Fluoro-Max 4 fluorometer

The Horiba FluoroMax 4 spectrometer is an effective tool for measuring fluorescence of solids, liquids, powders and thin films.

55

27.5

Nanochemistry Lab - General Use

This includes general use of Nanochemistry bench and lab space.

73

36.5

Legend XFR Centrifuge #1

This instrument can handle a range of general-purpose processing including cell culture, microplate, microbiology and many others. 

55

27.5

Legend XFR Centrifuge #2

This instrument can handle a range of general-purpose processing including cell culture, microplate, microbiology and many others. 

55

27.5

Thermo Scientific Escalab Xi+ XPS

ESCALAB™ XI+ X-ray Photoelectron Spectrometer (XPS) combines high sensitivity with high resolution quantitative imaging and multi-technique capability, including UPS/ISS/REELS.

100

50

TA Instruments TGA 5500

The TGA 5500 is designed for the researcher that requires the highest level of performance and features in one package. Built to maximize temperature control and minimize drift, the TGA 5500 has less drift than any competitive TGA – even after they use post-test data manipulation! The TA patented IR furnace delivers the fastest heating and cooling rates available. The all new autosampler makes high productivity standard.

70 (pans not included)

35 (pans not included)

Materials Testing

Hot Disk TPS2500S Thermal Conductivity System

The TPS2500S is transient absolute measurment of thermal conductivity, thermal diffusivity and specific heat from 0.005 to 1000W/mK. This instrument is designed for testing thermal transport properties of solids, liquids, paste and powders.

55

27.5

TA Q200 Digital Scanning Calorimeter

The Q200 is a versatile, research-grade DSC with our patented Tzero technology with temperature range of ambient to 725C.

61

30.5

TA Q500 Thermogravimetric Analyzer

Thermogravimetric analysis is capable of thermal analysis in which changes in physical and chemical properties of materials are measured as a function of increasing temperature or as a function of time.

61

30.5

Cascade REL-4800 Manual Probe Station

This is manual wafer load probe station with 200mm vacuum chuck. It also includes 5 vacuum connections for manipulators on each side with motic PSM-1000 microscope.

Contact for pricing

Contact for pricing

Hysitron TI 950 Nanoindenter

The TI 950 TriboIndenter nanoindenter is an automated, high throughput instrument to support nanomechanical and nanotribological characterization over the nano and microscales. The instruments also enables High Precision Scanning Probe Microscopy.

70

35

TA HR20 Rheometer

The TA-Discovery HR 20 Rheometer is an effective tool for rheological measurements to analyze material flow and deformation behavior under varying conditions. It can measure viscosity, shear stress, storage modulus, loss modulus, and phase angle with respect to time, temperature, shear rate, and frequency. It has two heating system options: Peltier plate (-40° C to 200° C ) and environmental test chamber    ( up to 760 °C).

70

35

TA HR20 Dynamic Mechanical Analyzer (DMA)

The TA-Discovery HR 20 Dynamic Mechanical Analyzer (DMA) measures viscoelastic properties under varying temperature and frequency conditions. Available geometries include film tension, 3-point bending, and single/dual cantilever. Superior temperature control with the environmental test chamber (ETC) up to 500 °C, with a maximum axial force of 50 N, and maximum oscillation displacement of 100 µm.

70

35

Micro and Nanofabrication

Carbolite High Temp Furnace

This is a high temperature furnace for laboratory, research & process applications.

61

30.5

Cleanroom General Use

This includes entry fees to use cleanroom.

130

65

Air Control Wet Bench - Poly

This 200 mm compatible wet bench is primarily used for general wet chemical etching.

included in cleanroom fee

included in cleanroom fee

Air Control Wet Bench - Stainless

This 200 mm compatible wet bench is primarily used for CMOS-level cleans.

included in cleanroom fee

included in cleanroom fee

Americhem Wet Bench

This 200 mm wet bench is primarily used for special etching purposes.

included in cleanroom fee

included in cleanroom fee

Lam OnTrak DSS200 Series II Brush Cleaner

OnTrak DSS 200 Series 2 Double-sided PVA Scrubber is production-style tool for cleaning particles as small as 0.125 um in wafers up to 200mm.

30

15

3DGence F350 3D Printer

This instrument is a dual extruder 3D printer designed for industrial applications. It is suitable for working with a wide range of technical materials including high-performance thermoplastics.

10.00 (doesn't include cost of filament)

5.00 (doesn't include cost of filament)

IPEC Avanti CMP System

The IPEC 472 wafer polisher is a fully automated, precision tool for CMP polishing of semiconductor wafers used to achieve flatness, uniformity and planarization on patterned/device wafers. The 472 features automatic wafer handling and is capable of two platen, two-step polishing processing to maximize wafer throughput capability and quality. Designed to planarize wafers from 100mm to 200mm.

30

15

Novellus Concept 2 PECVD System

This tool can deposit stress-controlled silicon dioxide and nitride on wafer stack.

121

60.5

Plasmatherm ICP 770 DRIE

An ICP (inductively coupled plasma) etcher (DRIE) can be used to etch a variety of materials. This ICP is equipped with two chambers -- one is dedicated to deep anisotropic silicon (BOSCH process) trench etching and the other is used for silicon dioxide and polymer etching.

80

40

PVD 75 Evaporation System

The evaporator can be used to deposit metals dielectrics. The tool has 5 e-beam pockets and 1 thermal boat. Single substrate up to 12" diameter -Multiple substrate up to 4" diameter -Substrate fixture rotation up to 20 rpm.

30

15

PVD 75 Sputtering System

The sputterer can be used to deposit metals and dielectrics. The tool has 2 DC and 1 RF source. Coatings are performed by accelerating ions or an argon oxygen mixture into the surface of a sputter target, which is made of the material to be applied to the sample. -Sputter two or more dissimilar materials simultaneously for complete control of film stoichiometry (co-deposition). Single substrate up to 12" diameter -Multiple substrate up to 4" diameter -Substrate fixture rotation up to 20rpm.

30

15

Veeco Savannah S200 Thermal ALD

This is a Thermal Atomic Layer Deposition system for dielectrics with In-Situ Ellipsometry.

137.5

68.75

KLA Zeta 20 Optical Profiler

The Zeta™-20 is a fully integrated optical profiling microscope that provides 3D metrology and imaging capability in a compact, robust package. The system is powered by ZDot™ technology, which simultaneously collects high-resolution 3D data and a True Color infinite focus image. The Zeta-20 supports both R&D and production environments with Multi-Mode optics, easy-to-use software, and a low cost of ownership.

included in cleanroom fee

included in cleanroom fee

Gaertner Ellipsometer

The model LSE-WS Stokes WAFERSKAN Ellipsometer is a high speed film thickness mapping system measuring one site per second including stage travel! It uses advanced StokesMeter technology to give tilt-free, focus free, 2D/3D color thickness and index images.

included in cleanroom fee

included in cleanroom fee

Jandel Multi-Height 4 Point Probe

High quality, easy to use system for measuring the sheet resistance and/or volume resistivity of wafers up to 200mm in diameter.

included in cleanroom fee

included in cleanroom fee

Laurell Spin Processor with Wet Station

This coater system can accommodate up to 200mm wafers with recommended rotational speed of 3000 RPM.

included in cleanroom fee

included in cleanroom fee

OAI 8808 Mask Aligner

The OAI Model 8008 Mask Aligner is a semi-automated, four-camera, optical front and backside mask Aligner. It delivers ultra-precise (1m-2m) alignment accuracy.

60

30

PE-100-RIE Plasma Etch System

This tool is capable of plasma cleaning or plasma etching with 300W 100KHz continuously variable power supply.

included in cleanroom fee

included in cleanroom fee

Tousimis 916B Critical Point Dryer

This is a supercritical CPD MEMS dryer for 8" wafers. The temperature range is -30C to 60C, and the pressure range is 0 to 2000 psi.

20

10

Vacuum Oven

This instrument is used to vacuum heat or cure substrates.

included in cleanroom fee

included in cleanroom fee

MicroFab Jetlab 4 Ink Printer System

This tool can print droplets in an area of 160 X 120 mm with 20um accuracy.

50

25

Other Resources

Nikon X-ray CT XT H 225 ST 2x

See details here: https://jsnn.ncat.uncg.edu/nikon-x-ray-ct/g

125

75.00 (external), 35.00 (internal) 

Computer Workstation for Nikon CT

See details here: https://jsnn.ncat.uncg.edu/nikon-x-ray-ct/g

25

25.00 (external), 15.00 (internal) 

Beckman Coulter Cytoflex Flow Cytometer

The CytoFLEX Flow Cytometer, the first introduction to the CytoFLEX Platform, provides superior sensitivity and resolution throughout all configurations. It utilizes CytExpert for CytoFLEX Acquisition and Analysis Software.

60

30

FACS Aria III - Flow Cytometer System

BD FACSAria provides unrivaled sensitivity and resolution for cell sorting. Wavelength choices include 561-nm and 445-nm lasers, as well as the 488-nm, 633-nm, 405-nm, and 375-nm lasers.

73

36.5

Boston Micro Fabrication Microarch S230 PµSL (Projection Micro Stereolithography) Printer