Dr. Daniel Herr

Daniel Joseph Christian Herr, Ph.D.

Professor & Nanoscience Department Chair


I have been to hundreds of facilities and seen thousands of students and there is nothing like the Joint School.

Phone: (336) 285-2862

Curriculum Vitae: PDF, January 2018

Dr. Herr is a pioneer in collaborative nanotechnology research, development, manufacturing and innovative supply chain management. He serves as UNC-Greensboro’s professor and Nanoscience Department Chair at the Joint School of Nanoscience and Nanoengineering (JSNN) in Greensboro, North Carolina. He leads a highly collaborative, transdisciplinary team that explores foundational nanoscience questions and addresses emerging, high impact and convergent national grand challenges and application opportunities. He also serves as Adjunct Associate Professor in Materials Science and Engineering at North Carolina State University, where he coteaches a graduate level course on The Materials Science of Nanoelectronics.

He serves as the JSNN’s site PI for the National Nanotechnology Coordinated Infrastructure’s (NNCI) Southeastern Nanotechnology Infrastructure Corridor (SENIC) cluster, a National Science Foundation (NSF) funded program with the Georgia Institute of Technology (GA Tech). SENIC provides academic, industrial and government researchers access to university nanoscale science and nanoengineering expertise and user facilities, with leading edge fabrication and characterization tools that help to drive the realization of the Internet of Things. He also serves as Lead-PI on a NIH ‘Maximizing Access to Research Careers (MARC) U-STAR award, which provides support for undergraduate students, who are underrepresented in the biomedical sciences to improve their preparation for high-caliber graduate training at the Ph.D. level.

Sustainable and Functional Hydroponics.
Carbon Nanotubes and Functional Nanotubes.
Super Absorbent Polymers.
Self Assembly

HONORS

2011-15 Member-at-Large (Nationally elected) Industrial Science and Technology Section, AAAS, USA
2005- Fellow International Society for Optical Engineering, WA


AWARDS

2017    UNCG Faculty Excellence in Research and Creative Activity Award

2016    UNCG Faculty Excellence in Research and Creative Activity Award

2005     Contributing SRC team member, National Medal of Technology Department of Commerce, USA

2004     Inventor Award North Carolina State University, NC

2003     Inventor Recognition Award Semiconductor Research Corporation, NC

2000     Inventor Recognition Award Semiconductor Research Corporation, NC

1985     Performance Award Honeywell, MN

BOOKS

  • Kelkar, A., Herr, D.J.C. and Ryan, J. (Eds.). (2014). Nanoscience and Nanoengineering: Advances and Applications, Boca Raton, FL: CRC Press.
  • Herr, D.J.C., Hren, J., and Zhirnov, V. (Smart Materials, Self-Assembly and Nanoelectronics. This manuscript is in preparation under contract with William Andrews Inc., but currently is on hold.
  • Seiler, D.G., Diebold, A.C., McDonald, R., Garner, C.M., Herr, D.J.C., PP. Khosla, E. M. Secula (Editors). (2007). Frontiers of Characterization and Metrology for Nanoelectronics: 2007, American Institute of Physics Conference Proceedings, 931, Melville, NY: American Institute of Physics
  • Herr, D.J.C.  (Chair/ed.). (2003). Metrology, Inspection, and Process Control for Microlithography XVII, Part I, Proceedings of the International Society for Optical Engineering Volume 5038, SPIE:  Bellingham, WA.
  • Herr, D.J.C.  (Chair/ed.). (2003). Metrology, Inspection, and Process Control for Microlithography XVII, Part II, Proceedings of The International Society for Optical Engineering Volume 5038, SPIE:  Bellingham, WA.
  • Merhari, L., Gonsalves, K.E., Dobisz, E.A., Angelopoulos, M., Herr, D.J.C.  (ed.). (2002). Nanopatterning – From Ultralarge-Scale Integration to Biotechnology, Material Research Society Symposium Proceedings Volume 705, Materials Research Society:  Warrendale, PA.
  • Herr, D.J.C. (Chair/ed.). (2002). Metrology, Inspection, and Process Control for Microlithography XVI, Part I, Proceedings of The International Society for Optical Engineering Volume 4689, SPIE:  Bellingham, WA.
  • Herr, D.J.C.  (Chair/ed.). (2002). Metrology, Inspection, and Process Control for Microlithography XVI, Part II, Proceedings of The International Society for Optical Engineering Volume 4689, SPIE:  Bellingham, WA.

CHAPTERS


SELECTED ARTICLES

  • Herr, D.J.C. (April 5, 2015). Emerging Research Materials White Paper, International Technology Roadmap for Semiconductors, Washington, DC: Semiconductor Industry Association.
  • Herr, D.J.C. (April 2014). Convergent Technology Waves are Coming, Regardless … A Monolithically Integrated More Moore, More-than-Moore, and the SemiSynBio Landscape, International Roadmap Coordinating Committee, International Technology Roadmap for Semiconductors, 2014 ITRS Spring Meeting (Bad Nauheim, Germany), Washington, DC: Semiconductor Industry Association.
  • King, S.W., Simka, H., Herr, D.J.C., Akinaga, H., Garner, M.C. (July 18, 2013). The three M’s (materials, metrology and modeling) together pave the path to future nanoelectronics technologies, APL Materials, 1, 040701; http://dx.doi.org/10.1063/1.4822437. [Impact Factor=3.8; Recognized as one of APL Materials most cited papers]
  • Herr, D.J.C. (July 4, 2013). Introduction: What Next?, Future Fab International, 46
  • Herr, D.J.C. (2013). “What’s so unusual about nanomaterial melting points?”, Carolina Tips, Burlington, NC: Carolina Biological Supply Company.
  • Herr, D.J.C. (2012). “Introduction”, Future Fab, 41.
  • Herr, D.J.C. (2011). Directed block copolymer self-assembly for nanoelectronics fabrication, Journal of the Materials Research, 26(2), pp. 122-139.
  • Burke, P., Du, C., Herr, D.J.C., Jensen, J.O., Lugli, P., Radack, D.J., Stroscio, M., Swaminathan, M.V., Towe, E., and Woolard, D.L. (2011). Untitled, IEEE Transactions on Nanotechnology, 10(1), pp. 3-6.
  • Burke, P., Du, C., Herr, D.J.C., Jensen, J.O., Lugli, P., Radack, D.J., Stroscio, M., Swaminathan, M.V., Towe, E., and Woolard, D.L. (2010). Device Concepts, Architectural Strategies, and Interfacing Methodologies for Nanoscale Sensor Systems, IEEE Transactions on Nanotechnology, 9(5), pp. 523-526 Special Issue (September 2010).
  • Herr, D.J.C. and Michael Garner, M. (2009). Emerging Research Materials, International Technology Roadmap for Semiconductors, 2009 Edition.
  • Herr, D.J.C. (2008). Introduction:  New Technologies & Device Structures, Future Fab International, 26, on-line.
  • Herr, D.J.C. (2008). Introduction:  New Technologies & Device Structures, Future Fab International, 24, on-line.
  • Herr, D.J.C. and Garner, M. (2007). Emerging Research Materials, International Technology Roadmap for Semiconductors, 2007 Edition.
  • Herr, D.J.C. (2007). Section 4 – Introduction: Lithography, Equipment, and Materials, Future Fab International, 23, on-line.
  • Herr, D.J.C. (2007). Challenges in Directed Self-Assembly [1], Future Fab International, 22, on-line.
  • Cavin, R.K., Zhirnov, V.V., Herr, D.J.C. (2006). Research Directions and Challenges in Nanoelectronics (Invited Paper), Journal of Nanoparticle Research, 8 (6), pp 841-858.
  • Herr, D.J.C. (2006). Section 5 – Introduction: Lithography, Equipment, and Materials, Future Fab International, 21, p. 72.
  • Herr, D.J.C. (2006). “Section 5 – Introduction: Lithography, Equipment, and Materials”, Future Fab International, 20, p. 68.
  • Herr, D.J.C., Schellenberg, F.M., Capodieci, L., Rey, J. (2006). The SRC MFD Meets DFM Forum, Future Fab International, 20, pp 44-46.
  • Herr, D.J.C. (2006). Update on the Extensibility of Optical Patterning Via Directed Self-Assembly, Future Fab International, 20, pp 82-86.
  1. Herr, D.J.C. (2006). The Potential Impact of Natural Dopant Wavefront Roughness On High Frequency Line Edge Roughness Requirements II, SRC: Research Triangle Park, NC (June 2006).; b. Herr, D.J.C. (2005). The Interdependence of Intrinsic Dopant Wavefront Roughness and the Limits of High Frequency Line Edge Roughness, appendix ITRS 2005 Edition.
  • Cavin, R.K., Herr, D.J.C., Zhirnov, V.V., et.al. (2005). A long-term View of Research Targets in Nanoelectronics (Invited Paper), Journal of Nanoparticle Research, 7(6), pp. 573-58.
  • Herr, D.J.C. (2005). The Extensibility of Optical Patterning Via Directed Self-Assembly on Nano-Engineered Imaging Materials, Future Fab International, 18, pp 93-96.
  • Herr, D.J.C., Zhirnov, V.V., Bowling, A., Robertson, F., Eib, N. (2005). Developments In The Strategic Partnership Between The U.S. Government And The Semiconductor Industry, Part II, Future Fab International, 18, pp. 22-25.
  • Herr, D.J.C. and Zhirnov, V.V. (2004). Developments in the Strategic Partnership Between the U.S. Government and the Semiconductor Industry, Future Fab International, 17, pp 16-18.
  • Herr, D.J.C. and Zhirnov, V.V. (2004) Nanoengineered Electronic Materials Get Real With Directed Self-Assembly, Solid State Technology, 47(6), pp. 26-31.
  • Herr, D.J.C. and Gillespie, S. (2003). Low Volume Patterning Workshop Report, Semiconductor Research Corporation:  Research Triangle Park, NC (2003).
  • Herr, D.J.C. (2003). Low Volume Patterning Demonstration Program – A Path to Competitive, Low Cost Microelectronics Fabrication, Semiconductor Research Corporation, Research Triangle Park, NC.
  • Cavin, R.K., Herr, D.J.C., Zhirnov, V.V., et.al. (2002). On Challenging Sub-70 nm Semiconductor Materials and Processes, IEEE Transactions on Semiconductor Manufacturing (Invited Paper), 15(2), pp. 157-168.
  • Zhirnov, V.V., Cavin, R.K., Herr, D.J.C., and Wooldridge, T.A. (2002). On Designing Sub-70 nm Semiconductor Materials and Processes (Invited Paper), IEEE Transactions on Semiconductor Manufacturing, 15(2), pp.157-168.
  • Zhirnov, V.V. and Herr, D.J.C. (2001). New Frontiers: Self-Assembly and Nanoelectronics, IEEE Computer, 34(1), pp. 34-43.
  • Herr, D.J.C., Zhirnov, V.V., and Meyyappan, M. (2001). SRC/NASA Ames Workshop Report:  Self Assembly for Nanoelectronics, SRC: RTP, NC.
  • Herr, D.J.C. and Zhirnov, V.V. (1999). SRC Workshop Report:  Microelectronics at the End of the Roadmap, SRC:  RTP, NC.
  • Herr, D.J.C., Zhirnov, V.V. and Meyyappan, M. (1999). SRC/NASA Ames Workshop Report:  Emerging Opportunities and Issues in Nanotubes and Nanoelectronics, SRC:  RTP, NC.
  • Bokor, J., F. Cerrina, F., Frechet, J.F.J., Herr, D.J.C., McCord, M., Oldham, W.G.,  Smith, H.I. and Willson, C.G. (1997). Towards Molecular Scale Patterning, SRC: RTP, NC.
  • Herr, D.J.C. (1997). SRC Workshop Report: Novel Concepts for Sub-130 NM Optical Lithography, SRC Newsletter:  RTP, NC.
  • Herr, D.J.C. (1996). SRC Workshop Report: Critical Issues in Charged Beam Patterning, SRC:  RTP, NC.
  • Herr, D.J.C. (1995). A Proactive Approach to Managing Environment, Safety, and Health Research, SRC:  RTP, NC.
  • Herr, D.J.C. and Willson, C.G. (1995). Advances in Photoresists Will Require Coordinated University Research Effort, Solid State Technology.
  • Herr, D.J.C. (1995). Joint SRC/NSF Center for Environmentally Benign Manufacturing, SRC Newsletter:  RTP, NC.
  • Herr, D.J.C. (1994). SRC Workshop Report: Critical Issues in Advanced Imaging Materials, SRC Newsletter:  RTP, NC.
  • Thackeray, J.W., Orsula, G.W., Rajaratnam, M.M., Sinta, R., Herr, D.J.C. and Edward Pavelchek, E. (1991). Dissolution Inhibition Mechanism of ANR Photoresists:  Crosslinking vs. -OH Site Consumption, Proceedings of the International Society for Optical Engineering, 1466, 39.
  • Takahashi, H., Wakui, K., Herr, D.J.C., Petersen, J.S., Fedynyshyn, T.H. and Cronin, M.F. (1990). An Advanced Chemically Amplified Resist, Proceedings of the International Society for Optical Engineering, 1263, 330.
  • Herr, D.J.C. (1990). Optimization Strategies for Microelectronic Devices and Processes, Bellingham, WA: The Society of Photo-optical Instrumentation Engineers.
  • Petersen, J.S., Herr, D.J.C., Marvin Lutz, M. and John L. Bontrager, J.L. (1988). An Experimental Method for the Minimization of Linewidth Variation in Photoresist Patterns Over Polysilicon Topography, Proceedings of the International Society for Optical Engineering, 921, 326, Bellingham, WA: The Society of Photo-optical Instrumentation Engineers.
  • Herr, D.J.C. (1987). Optimization Methods for Lasers and Other Electro-Optical Devices, Bellingham, WA: The Society for Photo-optical Instrumentation Engineer.
  • Herr, D.J.C. (1987). The Contribution of Substituent-Substituent Interactions to the pKa’s of Methyl Substituted Benzoic Acids, Abstracts of papers of the American Chemical Society, 193, p. 114 ORGN.
  • Herr, D.J.C. (1987). Applications of Response Surface Methodology:  I. A General and Practical Approach to Process Optimization, Proceedings of the International Society for Optical Engineering, 771, 290, Bellingham, WA: The Society of Photo-optical Instrumentation Engineers.
  • Herr, D.J.C. (1984). Mechanistic Studies of the SRN1 Mechanism for Aromatic Substitution, Ph.D. Thesis, University of California: Santa Cruz, CA.

NAN-621:

Professional Development Seminar I

Workplace issues including ethics, confidentiality, writing and presentation skills, innovation, entrepreneurship, and emerging issues in nanotechnology. (Graded on S-U basis) (1:1)

NAN-622:

Professional Development Seminar II

Workplace issues including business plans, globalization, emerging issues in nanotechnology, and further development of writing and presentation skills, innovation, and entrepreneurship. (Graded on S-U basis) (1:1)

NAN-698:

Professional MS in Nanoscience Internship

Internship at a facility engaged in nanotechnology activity in order to gain practical experience with aspects of nanotechnology. (Graded on S-U basis) (6:0:24)

NAN-710:

Science Integrity

Explores contemporary issues related to scientific integrity and responsible conduct in research (RCR). (1:1)

Summer Science Academy for Rising 9th Graders
A Platform for Hands-on Teamwork and Creativity

2015 Team

 

 

 

 

 

 

2016 Team


Summer Science Academy for Rising 10th Graders
3D Printing: Design, Coding, Fabrication and Testing

Media1

Demonstrating Hand-Held Aerial Vehicles

Dr. Herr loves telling stories about amazing people. Click below to see some of his favorite stories of real life people making a difference.

New Bionics That Let Us Run, Climb & Dance
Talk Nerdy To Me
Pain, Pus & Poison: The Search for Modern Medicines
Hummingbird Drone
My 12 Pairs of legs
Laminar Flow
Laminar Flow

Dr. Herr’s Research Team

Scott Jalovec

PhD Candidate, Hydroponics Research

Micheal Azad

Micheal Azad

PhD Canidate, Super Adsorbents

 

Matthew Craps

Matthew Craps

PhD Candidate, Self Assembly